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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7091
2 Nitrogen Gas Generator 6327
3 Ellipsometer 5960
4 4 - Point probe Unit (surface resistance) 6523
5 Thickness measurement equipment 5947
6 DI water System 7834
7 Centrifugal system coating SOG 5866
8 Evaporation systems 6055
9 Sputter system 5985
10 Optical microscope 6936

Hanoi University of Science and Technology(HUST)

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