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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7459
2 Nitrogen Gas Generator 6683
3 Ellipsometer 6340
4 4 - Point probe Unit (surface resistance) 6885
5 Thickness measurement equipment 6319
6 DI water System 8217
7 Centrifugal system coating SOG 6234
8 Evaporation systems 6446
9 Sputter system 6368
10 Optical microscope 7324

Hanoi University of Science and Technology(HUST)

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