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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7192
2 Nitrogen Gas Generator 6434
3 Ellipsometer 6080
4 4 - Point probe Unit (surface resistance) 6623
5 Thickness measurement equipment 6058
6 DI water System 7957
7 Centrifugal system coating SOG 5971
8 Evaporation systems 6170
9 Sputter system 6107
10 Optical microscope 7055

Hanoi University of Science and Technology(HUST)

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