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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7743
2 Nitrogen Gas Generator 6948
3 Ellipsometer 6600
4 4 - Point probe Unit (surface resistance) 7148
5 Thickness measurement equipment 6588
6 DI water System 8512
7 Centrifugal system coating SOG 6502
8 Evaporation systems 6722
9 Sputter system 6650
10 Optical microscope 7599

Hanoi University of Science and Technology(HUST)

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