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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7418
2 Nitrogen Gas Generator 6632
3 Ellipsometer 6290
4 4 - Point probe Unit (surface resistance) 6832
5 Thickness measurement equipment 6269
6 DI water System 8164
7 Centrifugal system coating SOG 6179
8 Evaporation systems 6393
9 Sputter system 6312
10 Optical microscope 7263

Hanoi University of Science and Technology(HUST)

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