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Equipments of Laboratory for Micro-nano Systems and Sensor

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1 Nitrogen liquid generator 7662
2 Nitrogen Gas Generator 6882
3 Ellipsometer 6532
4 4 - Point probe Unit (surface resistance) 7078
5 Thickness measurement equipment 6519
6 DI water System 8431
7 Centrifugal system coating SOG 6434
8 Evaporation systems 6647
9 Sputter system 6569
10 Optical microscope 7520

Hanoi University of Science and Technology(HUST)

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