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Vu Ngoc Hung
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Monday, 03 May 2010 11:40

Full Name:  Prof. Dr. Vu Ngoc Hung
Work address: Room 307, ITIMS-Building, No. 1 Dai Co Viet, Hai Ba Trung, Hanoi, Vietnam
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Position: MEMS Group Leader 

Tel:  84 4 38680787
Fax: 84 4 38692963

1. Teaching Courses:

  • Microsystem technology
  • Semiconductor physics
  • Introduction to materials science and engineering
  • Electronic materials & processing
  • Thin film: physics and engineering
  • Optoelectronics
  • Laser  

    2. Research Interests: 

    • MicroElectroMechenical Systems-MEMS

    • Nanomaterials intergrated QCM

    • Ferroelectric materials

    3. Published  Papers:

    1. Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, Masayoshi Esashi. "Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance", J. Applied Physics Letters , Vol. 81, Issue 26 (2002), pp. 5069-5071. (IF: 4.207)

    2. Takashi  Abe, LiLi, Vu Ngoc Hung, and Masayoshi Esashi. "Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry". Proceedings of the 16 th  IEEE International Micro Electro Mechanical Systems (MEMS) Conference, Kyoto, Japan, Jan. 2003,  pp. 518-521.

    3. Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, Masayoshi Esashi.  "High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE". Sensors and Actuators A 108 (2003), pp. 91–96. (IF: 1.422)

    4. Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi. "Inverted mesa-type quartz crystal resonators fabrication by deep-reactive ion etching". J. IEEE transactions on ultrasonics, ferroelectrics, and frequency control  , Vol 53, No7 (2006), pp. 1234-1236. (IF: 1.729)

    5. L.H. Nguyen, T.V.Phi, P.Q. Phan, H. N. Vu, C. Nguyen-Duc, F. Fossard, "Synthesis of multi-walled carbon nanotubes for NH3 gas detection", J. Phys. E  37 (2007), pp. 54-57. (IF: 0.497)

    6. Vu Ngoc Hung et . all. "Design and fabrication of a miniaturized three-degree-of-freedom piezoresistive acceleration sensor based on MEMS technology using deep reactive ion etching", Physics and Engineering of New Materials 127 (2009), pp. 377-381.

    7. Phuc Hong Pham, Lam Bao Dang , Hung Ngoc Vu. "Micro robot system with moving micro-car driven by electrostatic comb-drive actuators". Microsystems Technology   No 4 Vol 16 (2010) , pp. 505-510. (IF: 1.069)

    8. Nguyen Van Quy, Vu Anh Minh, Nguyen Van Luan, Vu Ngoc Hung, and Nguyen Van Hieu, "Gas sensing properties at room temperature of a quartz crystal microbalance coated with ZnO nanorods", Sensors and Actuators B, 153 (2011), pp. 188-193. (IF: 3.898)

    9. Minh D. Nguyen, Hung N Vu, Dave H A Blank and   Guus Rijnders, "Epitaxial Pb(Zr,Ti)O3 thin films for a MEMS application", Adv. Nat.Sci.:Nanosci. Nanotechnol.2 (2011) 015005

    10. Nguyen Thanh Huy and Vu Ngoc Hung, "Influence of adhesion layers on the surface morphology of platinum-based electrodes for Pb(Zr,Ti)O3 thin films", Surface Review and Letters , Vol. 18, 1 & 2 (2011), pp. 47-51.  (IF: 0.493)

    11. Vu Anh Minh, Le Anh Tuan, Tran Quang Huy, Vu Ngoc Hung, Nguyen Van Quy, "Enhanced NH3 gas sensing properties of a QCM sensor by increasing the length of vertically orientated ZnO nanorods", Applied Surface Science 265 (2013), pp. 458-464. (ISSN:0169-4332) (IF: 2.21)

    12. Minh D. Nguyen, Chi T. Q. Nguyen, Thong Q. Trinh, Tai Nguyen, Thao N. Pham, Guus Rijnders and Hung N. Vu, "Enhancement of ferroelectric and piezoelectric properties in PZT thin films with heterolayered structure", Materials Chemistry and Physics 138 (2013), pp. 862-869. (ISSN:0254-0584) (IF: 2.23) 

    13. Hoang Manh Chu, Hung Ngoc Vu, Kazuhiro Hane, "Electric feed-through for vacuum package using double-side anodic bonding silicon-on-insulator wafer", Jounal of Electrostatics, Volume 71, Issue 2, (2013), pp. 130–133 (ISSN: 0304-3886) (IF: 1.0)

    14. Minh Duc Nguyen, Matthijn Deskkers, Hung Ngoc Vu, Guus Rijnders , "Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors", Sensors and Actuators A 199 (2013), pp. 98-105 (IF: 1.84)

    15.  Minh Duc Nguyen, Evert Houwman, Matthijn Dekkers, Hung Ngoc Vu and Guus Rijnders, "A fast room-temperature poling process of piezoelectric Pb(Zr0.45Ti0.55)O3 thin films", Science of Advanced Materials , 6 (2014), pp. 243-251.(IF: 2.598)

    16. Minh D. Nguyen, Thong Q. Trinh, Matthijn Dekkers, Evert P. Houwman, Hung N. Vu and Guus Rijnders, “Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates”, Ceramics International , 40 (2014), pp. 1013-1018.       (IF: 2.605)

    17. Thong Quang Trinh, Long Quang Nguyen, Dzung Viet Dao, Hoang Manh Chu and Hung Ngoc Vu, “Design and analysis of a lateral axis tuning fork gyroscope with guided-mechanical coupling”, Microsystem Technologies, 20 (2014) pp. 281-289. (IF: 0.875)

    18. Ngo Duc Quan, Vu Ngoc Hung, Nguyen Van Quyet, Hoang Vu Chung  and Dang   Duc Dung, “Band gap modification and ferroelectric properties of      Bi0.5(Na,K)0.5TiO3-based by Li substitution”,  AIP Advances 4, 017122 (2014);       (IF: 1.524)

    19. Nguyen, C.T.Q. and Nguyen, M.D. and Dekkers, J.M and Houwman, E.P. and Vu, Ngoc Hung and Rijnders, A.J.H.M. (2014) "Process dependence of the piezoelectric response of membrane actuators based on PZT thin films". Thin solid films  556, pp. 509 - 515. ISSN 0040-6090      (IF: 1.759)

    20. Vu Van Quang, Vu Ngoc Hung, Le Anh Tuan, Vu Ngoc Phan, Tran Quang Huy, Nguyen Van Quy, “Graphene-coated quartz crystal microbalance for detection of volatile organic compounds at room temperature”, Thin Solid Films  568 (2014), pp. 6 -12. DOI: (IF: 2.03)

    21. Ngo Duc Quan, Luong Huu Bac, Duong Van Thiet, Vu Ngoc Hung, and Dang Duc Dung. "Current Development in Lead-Free Bi0.5(Na,K)0.5TiO3-Based Piezoelectric Materials".  Advances in Materials Science and Engineering. 08/2014; (IF: 0.9)

    22. N.D. Quan, N.V. Quyet, L.H. Bac, D.V. Thiet, V.N. Hung, D.D. Dung. "Structural, ferroelectric, optical properties of A-site-modified Bi0.5(Na0.78K0.22)0.5Ti0.97Zr0.03O3 lead-free piezoceramics." . Journal of Physics and Chemistry of Solids  77 (2015), pp. 62–67.
      ( IF: 1.853 )
    23. Vu Thu Hien, Nguyen Duc Minh, Vu Ngoc Hung. "Synthesis and characterisations of sol-gel-derived LaNiO3 thin-film electrodes on Si substrates".  International Journal of Nanotechnology . 05/2015; 12(5/6/7):496-504. DOI: 10.1504/IJNT.2015.067907 (IF: 1.09)

    24. Hoang Manh Chu, Minh Van Nguyen, Hung Ngoc Vu , Kazuhiro Hane. "Fabrication of single-crystal silicon nanowires based on surface wet adhesion". Materials Letters" 152 (2015) pp.94-97. (IF:  2.489 )

    25. Hien  Thu  Vu ,  Minh  Duc  Nguyen,  Evert  Houwman,  Muhammad  Boota, Matthijn  Dekkers,  Hung  Ngoc  Vu,  Guus  Rijnders. "Ferroelectric and piezoelectric responses of (110) and (001)-oriented epitaxial Pb(Zr0.52Ti0.48)O3 thin films on all-oxide layers buffered silicon". Materials Research Bulletin 72 (2015), pp. 160-167. (IF: 2,288)

    26. Minh D. Nguyen, Matthijn Dekkers, Evert P. Houwman, Hien T. Vu, Hung N. Vu, and Guus Rijnders. "Lead-free (K0.5Na0.5)NbO3 thin films by pulsed laser deposition driving MEMS-based piezoelectric cantilevers". Materials Letters 164 (2016), pp. 413 - 416. (IF:2.489)

    27. Ngo Duc Quan, Vu Ngoc Hung, Ill Won Kim, and Dang Duc Dung "Bipolar Electric Field Induced Strain in Li Substituted Lead-Free Bi0.5(Na0.82K0.18)0.5Ti0.95Sn0.05O3 Piezoelectric Ceramics". J. Nanosci. Nanotechnol.16 (2016), pp.7978-7982. (IF: 1.556)

    28. Minh D. Nguyen, Evert P. Houwman, Matthijn Dekkers, Chi T. Q. Nguyen, Hung N. Vu, and Guus Rijnders. "Research Update: Enhanced energy storage density and energy efficiency of epitaxial Pb 0.9La0.1(Zr0.52Ti0.48)O3 relaxor-ferroelectric thin-films deposited on silicon by pulsed laser deposition" . APL MATERIALS  4 (2016), 080701, ; doi: 10.1063/1.4961636.      (IF: 4.323)

    29. Minh Ngoc Nguyen, Nhat Sinh Ha, Long Quang Nguyen, Hoang Manh Chu and Hung Ngoc Vu. "Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping". Micromachines  8, 42; doi:10.3390/mi8020042 (2017). (IF: 1.833)

    30. Chi T.Q. Nguyen, Minh D. Nguyen, Hien T.Vu, Evert P. Houwman, Hung N.Vu, Guus Rijnders. "High energy storage responses in all-oxide epitaxial relaxor ferroelectric thinfilms with the coexistence of relaxor and antiferroelectric-like behaviors". Thin Solid Films   636 (2017), pp. 188–192. (IF: 1.761)

    31. Hoang Manh Chu , Minh Van Nguyen, Hung Ngoc Vu, and Kazuhiro Hane. "25 nm Single-Crystal Silicon Nanowires Fabricated by Anisotropic Wet Etching". Journal of Nanoscience and Nanotechnology 17 (2017), pp. 1525-1529. (IF: 1.33)

    32. Ngo Duc Quan, Vu Ngoc Hung, and Dang Duc Dung. "Effect of Zr Doping on Structural and Ferroelectric Properties of Lead-Free Bi0.5(Na0.80K0.20)0.5TiO3 Films". Journal of electronics materials DOI: 10.1007/s11664-017-5603-9 (2017). (IF: 1.579)

    33. Ngo Duc Quan, Vu Ngoc Hung and Dang Duc Dung. "Influence of film thickness on ferroelectric properties Bi0.5(Na0.80K0.20)0.5TiO3 films". Mater. Res. Express   (2017). (IF:1.068)

    34. Minh Ngoc Nguyen, Long Quang Nguyen, Nhat Sinh Ha, Hoang Manh Chu, Trinh Duc Chu and Hung Ngoc Vu. "Z-axis tuning fork gyroscope having a controlled anti-phase and freestanding architecture: design and fabrication". Int. J. Nanotechnol. Vol. 15, Nos. 1/2/3 (2018).           (IF: 0.502)

    35. Minh D. Nguyen, Chi T.Q. Nguyen, Hung N. Vu, Guus Rijnders. "Controlling microstructure and film growth of relaxor-ferroelectric thin films for high break-down strength and energy-storage performance". Journal of the European Ceramic Society  38 (2018), pp. 95–103. (IF: 3.411)

    36. Ngo Duc Quan, Nguyen Van Hong, Tran Quoc Toan, Vu Ngoc Hung. "Enhanced ferroelectric properties and energy storage density in PLZT/BNKT heterolayered thin films prepared by sol-gel method". Physics of Condensed Matter, Dec 2018

    37. Ngo Duc Quan, Tran Quoc Toan, Vu Ngoc Hung, Minh D Nguyen. "Influence of Crystallization Temperature on Structural, Ferroelectric, and Ferromagnetic Properties of Lead-Free Bi 0.5 (Na 0.8 K 0.2 ) 0.5 TiO 3 Multiferroic Films". Advances in Materials Science and Engineering, January 2019, 2019:1-8
      DOI: 10.1155/2019/8976385

    38. Ngo Duc Quan, Tran Quoc Toan, Vu Ngoc Hung. "Influence of Crystallization Time on Energy-Storage Density and Efficiency of Lead-Free Bi 0.5 (Na 0.8 K 0.2) 0.5 TiO 3 Thin Films". Advances in Condensed Matter Physics, Jan 2019.

    39. Ngo Duc Quan, Chu T. Thanh Huong, Nguyen T. Hong Phuong, Nguyen Van Hong, Vu Ngoc Hung, Minh-Duc Nguyen. "Structural, Ferroelectric and Energy-Storage Properties of Lead-Free Zrdoped Bi 0.5 (Na 0.80 K 0.20 ) 0.5 TiO 3 films", Sur face Review and Letters, January 2019 (DOI: 10.1142/S0218625X19500823)
    40. N.D. Co, L.V. Cuong, B.D. Tu, P.D. Thang, L.X. Dien, V.N. Hung, N.D. Quan, "Effect of Crystallization Temperature on Energy-Storage Density and Efficiency of Lead-Free Bi0.5(Na0.8K0.2)0.5TiO3 Thin Films Prepared by Sol-Gel Method", Journal of Science: Advanced Materials and Devices,


      4. Published Books:

      • Quang điện tử và thông tin quang sợi, ISBN 978-604-95-0202-6, Nhà xuất bản Bách khoa Hà Nội, 2016.
      • Công nghệ vi hệ thống cơ điện tử, ISBN 978-604-93-8865-1, Nhà xuất bản Bách khoa Hà Nội, 2016.
      • MEMS áp điện: vật liệu và linh kiện, ISBN 978-604-95-0202-6, Nhà xuất bản Bách khoa Hà Nội, 2017.

      5. Other information:



      Year of graduation

      Field and university



      Solid state physics; HUST




      Physics; Kishinev University, USSR

      Brief research background and working experiences:

      • 1980-2006: Lecturer & researcher at IEP, HUST

      • 1992- present: Lecturer at ITIMS, HUST

      Remarkable scientific projects:

      • International project: MEMS R&D Center HUT-Ritsumeikan Co-operation (participant).

      • KC02 project: Study of fabrication technology of MEMS-based devices for industrial and transport applications (Promoter).

      • NAFOSTED project: Study and development of micro integrated motion sensor based on MEMS (Micro Electro Mechanical Systems) technology (Promoter).

      Last Updated ( Friday, 03 May 2019 15:46 )

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