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Thickness measurement equipment
Tuesday, 16 September 2008 16:44

Thickness measurement equipment

Description::

Measure the thickness of thin film on different materials

Specification:

· Measurement method: 2D scan

· Regulation in manual or automatic mode

· Sample size: 1-10 cm2

· Manufacturer: KLA Tencor, USA

· Year of manufacture: 1994

Staff: Nguyen Van Toan

Key words: Thickness measurement equipment , KLA Tencor, USA

 


  

 

Hanoi University of Science and Technology(HUST)

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