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Sputter system
Tuesday, 16 September 2008 15:54

Sputtering system


Description:

  • Grow single and multilayer thin film from many original materials

Specifications:

  • Quartz lamp is used to dry sample before growth
  • Maximum vacuum: 3.10-7 Torr, turbo pump, 2 sputtering guns, 1 rotating substrate (heated by halogen lamp upto 450ºC), 1 high frequency source 500W, 1 DC source 750W

Contact: Nguyen Van Toan

Key words: sputtering system, Quartz lamp, sputtering guns

 

 

Hanoi University of Science and Technology(HUST)

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