Centrifugal system coating SOG |
Tuesday, 16 September 2008 16:00 | |||
Centrifugal system coating SOG Description: Grow thin film from silicate compounds, organic silicon compounds or substances as sources doped on silicon slab in microelectronics technology Specification: Rotation speed: 50-1000 rpm Time and rate controlled by program Manufacturer: SEMITEC, Germany Year of manufacture: 1996, installation and use: 1997 Code name: CPS 20 Contact: Nguyen Van Toan Key words: Centrifugal system coating SO, CPS 20, SEMITEC, Germany
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