Centrifugal system coating SOG

Description:

Grow thin film from silicate compounds, organic silicon compounds or substances as sources doped on silicon slab in microelectronics technology

Specification:

Rotation speed: 50-1000 rpm

Time and rate controlled by program

Manufacturer: SEMITEC, Germany

Year of manufacture: 1996, installation and use: 1997

Code name: CPS 20

Contact: Nguyen Van Toan

Key words: Centrifugal system coating SO, CPS 20, SEMITEC, Germany